| 摘要 |
PURPOSE:To simplify the control of the temp. of a discharged liq. and to prevent the coagulation of gelatin from the tip of a discharge part by controlling the temp. of gelatin extending from the inside of a container to the discharge part with the liq. having the temp. set by a temp. controller. CONSTITUTION:A second pipe 28 is formed by the first part contg. a first pipe 11 and the second part not contg. the pipe 11. A processing liq. 7 (e.g., gelatin) in the container 8 is supplied to a material 20 to be worked (e.g., wafer) through the pipe 11. A temp.-controlling liq. 6 in a thermostatic bath 1 is supplied between the pipes 28 and 11, and a pump 27 is provided at the second part. Consequently, the temp. of the gelatin extending from the inside of the container to the discharge part can be controlled with the liq. having the temp. set by the temp. controller 5, the control of the temp. of the discharge liq. is simplified, and the coagulation of gelatin from the tip of the discharge part is prevented. |
