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发明名称
MAGNETRON-TYPE SPUTTERING DEVICE
摘要
申请公布号
JPH0285364(A)
申请公布日期
1990.03.26
申请号
JP19880234183
申请日期
1988.09.19
申请人
NEC CORP
发明人
MORI MATSUTOMO
分类号
B08B17/02;C23C14/35;C30B25/00;H01L21/203;H01L21/285;H01L21/31;H01L21/3205
主分类号
B08B17/02
代理机构
代理人
主权项
地址
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