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发明名称
FORMATION OF AMORPHOUS SILICON FILM
摘要
申请公布号
JPH0285368(A)
申请公布日期
1990.03.26
申请号
JP19880233696
申请日期
1988.09.20
申请人
FUJITSU LTD
发明人
KATO ISAMU;ARAKI MAKOTO
分类号
C23C16/24;C23C16/50;C23C16/511;G03G5/08;H01L21/205
主分类号
C23C16/24
代理机构
代理人
主权项
地址
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