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发明名称
MANUFACTURE OF VERTICAL THIN FILM TRANSISTOR
摘要
申请公布号
JPH0284775(A)
申请公布日期
1990.03.26
申请号
JP19870305283
申请日期
1987.12.02
申请人
TOSHIBA CORP
发明人
TAKAYAMA AKIRA;SUDA YOSHIYUKI
分类号
H01L29/78;H01L29/786
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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