| 摘要 |
PURPOSE:To prevent the contamination of the internal mirror of the titled device by a method wherein, in the lateral flow type gas laser device having an internal mirror as a resonator, a nozzle from which laser gas will be emitted in the forward direction of the laser beam reflecting surface of the internal mirror, is provided and clean laser gas is supplied from said nozzle. CONSTITUTION:A plurality of discharge pins 12 are planted penetrating one of the external walls of a laser wind tunnel 1 and leaving the prescribed intervals between them, and a rod electrode 13 is arranged in parallel to the point of all these pins 12 leaving a space between them. Also, a highly reflecting mirror 15 is provided on the side of the extreme outside, a folding mirror 16 is arranged on the side of the outer most pin 12 facing the mirror 15, a folding mirror 17 is provided below the mirror 15, and also an output mirror 18 is provided at the position below the mirror 16 respectively. According to this constitution, nozzles 19-22 are provided at the end of the reflection surface of the mirrors 15-18, and the laser gas sent from a laser gas supply source 23 is jetted out to the mirrors at equal pressure through the intermediary of pipes. |
