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发明名称
SURFACE RELIEF TYPE DIFFRACTION GRATING AND FORMATION THEREOF
摘要
申请公布号
JPH0282202(A)
申请公布日期
1990.03.22
申请号
JP19880233713
申请日期
1988.09.20
申请人
FUJITSU LTD
发明人
AMAKO ATSUSHI;YAMAGISHI FUMIO;IKEDA HIROYUKI
分类号
G02B5/18
主分类号
G02B5/18
代理机构
代理人
主权项
地址
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