发明名称 |
FOERFARANDE FOER UNDERSOEKNING AV YTSTRUKTUR. |
摘要 |
<p>The invention relates to a method for examination of surface structures which differ with respect to refractive index and/or height modulation of the surface, these surface structures being brought into a surface/plasmon field and scanned by means of surface/plasmon microscopy.</p> |
申请公布号 |
FI901417(A0) |
申请公布日期 |
1990.03.21 |
申请号 |
FI19900001417 |
申请日期 |
1990.03.21 |
申请人 |
BASF AKTIENGESELLSCHAFT |
发明人 |
HICKEL, WERNER;KNOLL, WOLFGANG;ROTHENHAEUSLER, BENNO |
分类号 |
G01B11/06;G01B11/30;G01N21/552;G01N21/88;(IPC1-7):G01B/ |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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