| 摘要 |
<p>PURPOSE:To prevent the fluctuation of the relative positions of resistors due to attachment of a detecting apparatus and to improve accuracy by attaching an intake-air-temperature detecting resistor and a flow-speed detecting resistor to the same base material. CONSTITUTION:A thin film shaped intake-air-temperature detecting resistor 2 and a flow-speed detecting resistor 3 are attached to the plate surface part of a rectangular planar base material 1. The base material 1 is a silicon substrate on which a planar insulating film comprising glass, ceramics and the like is formed. The thin films of the resistors comprising nickel, platinum or the like are attached to the base material by evaporation, baking and the like, and the resistors 2 and 3 are formed. The flow-speed detecting resistor 3 is kept at a high temperature by self-heating. A current is supplied so that the temperature difference (resistance difference) between the resistor 3 and the intake-air-temperature resistor 2 is kept constant, and a flow speed is detected. Since the relative positions of both resistors 2 and 3 are kept constant, highly accurate measurement can be performed regardless of the attaching state.</p> |
