发明名称 Apparatus for inspecting the appearance of semiconductor devices
摘要 An apparatus for inspecting the appearance of a semiconductor device has an imaging device which forms an image of the outside of a semiconductor device. An image analyzer analyzes the image and determines whether the semiconductor device is good or bad. A semiconductor device to be inspected is removed from a first conveyor on the periphery of a turntable by a vacuum chuck which is mounted on the turntable, and the semiconductor device is transported to in front of the imaging device by a turntable. If the semiconductor device is determined to be good, the turntable transports the semiconductor device to a second conveyor on the periphery of the turntable, and the vacuum chuck deposits the semiconductor device on the second conveyor. If the semiconductor device is determined to be bad, the turntable transports the semiconductor device to a discard receiving mechanism on the periphery of the turntable, and the vacuum chuck deposits the semiconductor device on the discard receiving mechanism.
申请公布号 US4907701(A) 申请公布日期 1990.03.13
申请号 US19880233742 申请日期 1988.08.19
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 KOBAYASHI, KUNIO;ITOH, SEKIO
分类号 G01N21/84;B07C5/344;B65G47/86;B65G47/91;G01N21/88;G01N21/956;G01R31/265;H01L21/66;H05K13/08 主分类号 G01N21/84
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