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发明名称
PROBE BOARD
摘要
申请公布号
JPH0271539(A)
申请公布日期
1990.03.12
申请号
JP19880222756
申请日期
1988.09.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMANO TAKESHI;TATEISHI JUNJI;ODA SHUICHI
分类号
G01R31/28;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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