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发明名称
FILM CARRIER BOARD
摘要
申请公布号
JPH0269951(A)
申请公布日期
1990.03.08
申请号
JP19880222026
申请日期
1988.09.05
申请人
SHARP CORP
发明人
TSUDA TAKAAKI;HONDA YOSHIAKI;SENKAWA YASUNORI;MAEDA TAKAMICHI
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
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