FORMING METHOD FOR PATTERN,申请号JP19880221907-传众专利搜索

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发明名称	FORMING METHOD FOR PATTERN
摘要
申请公布号	JPH0269929(A)	申请公布日期	1990.03.08
申请号	JP19880221907	申请日期	1988.09.05
申请人	MITSUBISHI ELECTRIC CORP	发明人	KAWAI AKIRA
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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