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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0267762(A)
申请公布日期
1990.03.07
申请号
JP19880221116
申请日期
1988.09.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMAUCHI MASAHIDE;MORI TETSUO
分类号
H01L21/338;H01L21/28;H01L29/43;H01L29/812
主分类号
H01L21/338
代理机构
代理人
主权项
地址
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