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发明名称
FOCUSSED ION BEAM GENERATOR
摘要
申请公布号
JPH0266844(A)
申请公布日期
1990.03.06
申请号
JP19880219121
申请日期
1988.08.31
申请人
JEOL LTD
发明人
SAWARAGI HIROSHI
分类号
H01J37/05;H01J37/317;H01L21/265
主分类号
H01J37/05
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代理人
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