| 摘要 |
PURPOSE:To improve the corrosion resistance of a reflecting film which is applied on a transparent substrate and consists of zirconium oxide by providing the above-mentioned reflecting film and a protective film applied on this reflecting film to the memory body. CONSTITUTION:The reflecting film 2 is formed to 50 to 500nm thickness by a high-frequency magnetron sputtering method, ion plating method, cluster ion beam method, plasma CVD method, etc., of the zirconium nitride on the transparent substrate 1 consisting of, for example, tempered glass, quartz glass, polycarbonate resin, etc. The resin film is then applied on this reflecting film 2 as the protective film 3. The corrosion resistance of the reflecting film 2 is improved in this way. |
