| 摘要 |
PURPOSE:To notice the deteriorating state of a vacuum exhauster and to speedily carry out the maintenance work for the vacuum exhauster by comparing the real opening rate of a control valve to the opening rate of initial normal state of the control valve and checking it automatically. CONSTITUTION:An oil rotary pump 24, a control valve 23 and the control system 18 for the control valve 23 constitute an exhaust system. The control system 18 compares a real control opening of the control valve 23 to the initial control opening of the valve to examine automatically the exhausting capacity of the vacuum pump 24. As a result, the deteriorating state of the vacuum exhauster is examined, and the maintenance work for the vacuum exhauster is speedily carried out. |
