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经营范围
发明名称
CLEANING DEVICE
摘要
申请公布号
JPH0263586(A)
申请公布日期
1990.03.02
申请号
JP19880213296
申请日期
1988.08.27
申请人
NEC CORP
发明人
MATSUMOTO YOSHIHIRO
分类号
B08B3/08;B01D35/02;B01D39/04;C02F1/42;H01L21/304
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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