PARALLEL FLAT PLATE TYPE PLASMA ETCHING DEVICE,申请号JP19880211237-传众专利搜索

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发明名称	PARALLEL FLAT PLATE TYPE PLASMA ETCHING DEVICE
摘要
申请公布号	JPH0261078(A)	申请公布日期	1990.03.01
申请号	JP19880211237	申请日期	1988.08.24
申请人	NEC KYUSHU LTD	发明人	NISHIDA NORIAKI
分类号	H05H1/34;B05B1/34;B65G53/42;C23F4/00;H01L21/302;H01L21/3065;H05H1/42	主分类号	H05H1/34
代理机构		代理人
主权项
地址

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