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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPH0261060(A)
申请公布日期
1990.03.01
申请号
JP19880210317
申请日期
1988.08.24
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TAKEUCHI HIROSHI
分类号
C23C14/34;C23C14/46
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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