| 摘要 |
PURPOSE:To stably attain the control of high vapor deposition rate with superior reproducibility by providing a hearth liner of a specific shape between an evaporation source and a hearth in an electron beam-heating-type vacuum vapor deposition apparatus. CONSTITUTION:At the time of vapor-depositing Al by means of an electron beam heating-type vacuum vapor deposition apparatus, a BN composite is formed as a hearth liner 4 on the internal surface of a hearth 1 made of Cu for Al evaporation used for heating and evaporating Al for vapor deposition by means of electron beam irradiation, in which Al 3 as an evaporation source is melted and evaporated. Since this hearth liner 4 has a shape in which thickness is continuously changed from side face toward the base and respective planes facing each other have spherical shapes, respectively, resonance hardly occurs in the vibrations generated in the molten Al 3 as the evaporation source, and further, concentration of stress is removed and cracking due to heat shock is prevented, and, as a result, the effects of improving and stabilizing the evaporation velocity of Al and prolonging the service life of the liner 4 can be produced. |
