发明名称 CURING APRARATUS
摘要 PURPOSE:To generalize the use of many types of lead frames by forming a diffuser in a long hole shape extending oppositely over a plurality of pellets to be bonded. CONSTITUTION:The diffuser 7a of a diffusing header 7 is formed in a long hole state extending oppositely over a plurality of pellets 4 on a multiple-lead frame 3 in a structure for diffusing air over the whole pellets 4 from the single diffuser 7a. The longitudinal length of the diffuser 7a is determined by considering the longest length of various types of multiple-lead frame 3 in the arranging direction of the pellets 4 to be handled by a curing apparatus to cope with various types of the multiple-lead frame 3 having different lengths and different disposing intervals of the pellets 4 without replacing the nozzle member 7b of the header 7.
申请公布号 JPH0258343(A) 申请公布日期 1990.02.27
申请号 JP19880208342 申请日期 1988.08.24
申请人 HITACHI LTD 发明人 WADA TAKASHI;UEMATSU SHUNEI
分类号 H01L21/52 主分类号 H01L21/52
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