| 摘要 |
PURPOSE:To manufacture a sputtering target free from the occurrence of cracks and blowhole by constituting one surface of a mold by the use of a material with superior thermal conductivity and applying heating to the above surface up to a specific temp. CONSTITUTION:A ternary-system material, such as Tb-Fe-Co, is cast in a mold. A material with superior thermal conductivity is used for forming one surface of the above mold, such as a bottom 1, and this surface 1 is heated up to >=200 deg.C by means of a heater 4, etc., by which a difference in temp. between the vicinity of the center and the vicinity of outside periphery at the time of cooling is reduced. By this method, stress cracking due to the rapid cooling of the cast molten metal can be prevented, and the rare earth-transition metal alloy target free from the occurrence of cracks and blowhole can be manufactured. |
