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经营范围
发明名称
POSITIVE TYPE RESIST
摘要
申请公布号
JPH0258060(A)
申请公布日期
1990.02.27
申请号
JP19880208220
申请日期
1988.08.24
申请人
TOAGOSEI CHEM IND CO LTD
发明人
SATO MITSUYOSHI;FUJIMOTO YOSHIAKI;KIMURA KAORU
分类号
G03F7/039
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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