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发明名称
MANUFACTURE OF MOS TYPE SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0258219(A)
申请公布日期
1990.02.27
申请号
JP19880209031
申请日期
1988.08.23
申请人
SEIKO EPSON CORP
发明人
NAKAJIMA NOBUYUKI
分类号
H01L21/302;H01L21/3065;H01L21/336;H01L29/78
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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