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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0258224(A)
申请公布日期
1990.02.27
申请号
JP19880209004
申请日期
1988.08.23
申请人
FUJITSU LTD
发明人
SHINDO JUNJI
分类号
H01L21/3205;H01L21/203;H01L21/285;H01L23/52
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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