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经营范围
发明名称
SPIN COATER
摘要
申请公布号
JPH0254518(A)
申请公布日期
1990.02.23
申请号
JP19880205491
申请日期
1988.08.18
申请人
NEC CORP
发明人
TANIGAWA TETSUJI
分类号
G03F7/16;B05C11/08;B25J15/06;H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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