| 摘要 |
PURPOSE:To improve durability against fluctuation in temperature by providing an oxygen sensor containing an oxygen sensor element having solid electrolytic layers and an alumina layer. CONSTITUTION:An oxygen sensor 10 containing a film-like oxygen sensor element 12 having solid electrolytic layers 14a to 14c and an alumina layer formed on the main surface of the element 12 is provided. Ceramic green sheets to be the electrolytic layers 14a to 14c with SiO2 added to ZrO2 to have the heat expansion coefficient made approx. equal to that of alumina, and an alumina green sheet to be the alumina layer are laminated. Then by sintering simultaneously, the electrolytic layers 14a to 14c and the alumina layer are formed. Since the heat expansion coefficient of the element 12 is approx. equal to that of the alumina layer, stress due to fluctuation in temperature functioning between the element 12 and the alumina layer decreases. This improves durability of the sensor 10 against fluctuation in temperature. |
