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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT MEASURING APPARATUS
摘要
申请公布号
JPH0250448(A)
申请公布日期
1990.02.20
申请号
JP19880201202
申请日期
1988.08.12
申请人
NEC KYUSHU LTD
发明人
NAGATOME KENICHI
分类号
G01R31/28;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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