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发明名称
FILM-FORMING EQUIPMENT BY SPUTTERING METHOD
摘要
申请公布号
JPH0250958(A)
申请公布日期
1990.02.20
申请号
JP19880201377
申请日期
1988.08.12
申请人
CANON INC
发明人
YOSHIKAWA TOSHIAKI;ANDO KENJI
分类号
C23C14/34;C23C14/35
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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