| 摘要 |
PURPOSE:To improve effectiveness of the first time alignment for improving processing efficiency of a device by performing alignment inclusive of correction incorporating correction value equal in image shift and an amount and opposite in the direction in a previously exposed substrate to be exposed at the first time alignment in an alignment gap of the next substrate to be exposed. CONSTITUTION:A measuring means of horizontal slippage generated at the time of transfer, a memory means memorizing measured value Dox measured by a slippage measuring means, a correction value formation means obtaining the correction value equal in the amount to, and opposite in the direction to the slippage value Dox memorized in the memory means and the correction means performing positional correction in the horizontal direction of the substrate to be exposed and a negative according to the correction value -SAPO obtained by the correction value formation means are provided. Accordingly, the slippage value is measured and memorized previously at the time of former exposure, while performing alignment including positional correction in the horizontal direction according to the correction value obtained from the measured value at the time of the first time alignment in the first neighboring condition. Thereby, effectiveness of the first time alignment in a alignment gap is increased while improving exposure probability with no repeating of alignment. |
