| 摘要 |
PURPOSE:To prevent variations in laser oscillation time and to improve a life of an oscillator by connecting an impedance to a spare ionization pin in parallel, by providing an impedance to a main electrode in parallel, and by making discharge conditions between the first pulse and the following pulse the same. CONSTITUTION:Impedances 30A, 30B are connected to a spare ionization pins 9A, 10A and 9B, 10B in parallel and an impedance 31 is connected to main electrodes 7, 8 in parallel. When the impedances 30A, 30B, 31 are inductance in this pulse layer oscillator, a remaining voltage of the main electrodes 7, 8 is discharged at a frequency which is decided by peeking capacitors 11A, 11B, 12A, 12B and the impedances 30A, 30B. Therefore, it is possible to make a remaining voltage 32 disappear before starting of the succeeding pulse discharge by determining the frequency according to operation conditions of the laser oscillator. |
