| 摘要 |
PURPOSE:To improve treating efficiency and to reduce the variation in quality by providing a feed port for inert gases and a conveying pipe in the wall part of a hermetic forming tank provided with an evaporating source in the inside and providing a feed port for gaseous O2 and a vacuum evacuating port connecting to a vacuum pump to the conveying pipe. CONSTITUTION:A vacuum pump connecting to a vacuum evacuating port 6 is operated to evacuate the inside of a forming tank 1 and a capturing tank 7 and inert gases such as He or others are fed through the gas feed port 3 of the tank 1 into the tank so that ultrafine metallic particles are evaporated from an evaporating source 2. The ultrafine fine metallic particles are carried to the tank 7 by the inert gases flowing from the tank 1 to the port 6 through a conveying pipe 4 and the tank 7, and while the particles are suspended in the tank 7, the particles stick on capturing plates 8; thereafter, the particles are oxidized slowly with the gaseous O2 fed through the port 5. |
