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发明名称
RECOVERY DEVICE OF INERT GAS FOR SINGLE CRYSTAL PRODUCTING FURNACE
摘要
申请公布号
JPH0244092(A)
申请公布日期
1990.02.14
申请号
JP19880193269
申请日期
1988.08.02
申请人
TOSHIBA CERAMICS CO LTD
发明人
SATO SHUJI;NAKANISHI MASAMI;SUZUKI TATSUJI
分类号
C30B15/00;C30B29/06
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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