发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
摘要 PURPOSE:To efficiently realize attachment of pellet with high reliability by dicing a wafer at each insulating plate in a state that the plate covers to the rear face of the wafer, and pellet-bonding inner leads, tabs or the mounting position of a package substrate in this state as it is. CONSTITUTION:A semiconductor pellet 10 is cut in a state that an insulating plate 2 covers at the rear face side if a wafer 1 having a circuit forming face on one side face, and the pellets are bonded to the mounting positions in a state that the plate 2 covers. Thus, the pellet 10 having the plate on its rear face can be easily obtained, and a pellet bonding work can be efficiently performed with high reliability without addition of the mechanism of a device or large alteration of steps.
申请公布号 JPH0244751(A) 申请公布日期 1990.02.14
申请号 JP19880195862 申请日期 1988.08.05
申请人 HITACHI LTD 发明人 MIMATA TSUTOMU
分类号 H01L21/52;H01L21/301;H01L21/58;H01L21/67;H01L21/68;H01L21/78 主分类号 H01L21/52
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