| 摘要 |
PURPOSE:To miniaturize a robot and to effectively utilize the limited space inside a clean room by forming the structure of sucking the air currents of the internal part of a work robot and control device from the gap of the work robot upper part and exhausting from the lower part of the clean robot whole body. CONSTITUTION:Even in the case of dust caused inside a clean robot, this dust is discharged from the lower part of the main body 4 according to the air current sucked through the gap hole 6 of a work robot 1 upper part and flowing toward the lower part. So, the splash of dust into a clean room can be prevented. Also, due to a work robot 1 being provided at the control device 3 upper part the generated dust of the work robot 1 can be sucked into this main body 4 from the gap hole 6 provided at the work robot 1 upper part. Moreover, dust can be processed by using the dustproof mechanism of the clean room itself by exhausing air from the lower part of the clean robot main body 4. |
