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发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPH0239530(A)
申请公布日期
1990.02.08
申请号
JP19880189870
申请日期
1988.07.29
申请人
NEC CORP
发明人
OZAKI JUN
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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