| 摘要 |
<p>PURPOSE:To keep an integrated circuit from being damaged and avoid any electric shock hazard to the human body by specifying the volume specific resistance value of a jig as well as time required for causing an electrostatic charge voltage to attenuate up to 50V. CONSTITUTION:The volume specific resistance value of a jig which is used for handling a substrate mounted on an integrated circuit is given by the following expression: 1X10<6>-1X10<13>OMEGAcm and time required for causing an electrostatic charge voltage to attenuate up to 50V is given by 20-2000mil sec. In the cases where works relating to handling a semiconductor substrate such as its manufacturing, conveyance, maintenance, checking, replacement, and repairing are carried out, for example, even though an integrated circuit substrate is charged with electricity by handling the jig or a person charged with electricity handles such a substrate, electric charge is taken out gradually out of its system to the extent that the human sensation does not feel its charge. These arrangements prevent the integrated circuit from being damaged.</p> |
