| 摘要 |
PURPOSE:To shorten the changing time by changing the worked work sticking block returned to a changing position with unworked work sticking block one by one, in the work changing position fixed at the position of either work head whenever polishing stage and transfer stage are performed once alternately. CONSTITUTION:The stage of polishing for a fixed time the work 4a sticked on a block 4 with pressurizing the block 4 arranged on a surface plate 1 and the transfer stage transferring each block 4 by one interval part in the circumferential direction of the surface plate 1 are alternately performed. A worked work sticking block and unworked work sticking block are changed one by one by a changing arm 13 in the work changing device 12 fixed at the corresponding position to either work head whenever these two stages are executed. Consequently the changing time of the work 4a can be shortened very much and the fixture of an abrasive to the work 4a and the etching generation are reduced. |
