发明名称 POLISHING TOOL AND POLISHING METHOD
摘要 PURPOSE:To better the wettability of a work liquid for a tool surface and to uniformly disperse the work liquid on the whole tool surface by using a cellulose resin or its mixture that the cellulose with a cellulose as the base body is the main component as for the surface polishing tool of various materials. CONSTITUTION:A polishing tool 11 is formed by the cellulose resin with the cellulose making a cellulose as the base body being as the main component or the mixed resin contg. the same cellulose resin. The body 16 surface is subjected to polishing uniformly by matching this polishing tool 11 and the body 16 surface and relatively moving the both 11 and 16 with feeding the work liquid 17 contg. a particulate to the matching face.
申请公布号 JPH0236073(A) 申请公布日期 1990.02.06
申请号 JP19880185357 申请日期 1988.07.27
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 MATSUNAGA KAZUO;WATANABE JUNJI;SAITO TADAO
分类号 B24B57/02;B24B37/10;B24B37/20;B24B37/24;B24D3/28;B24D7/00;B24D11/00;B24D13/14 主分类号 B24B57/02
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