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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0228923(A)
申请公布日期
1990.01.31
申请号
JP19880180000
申请日期
1988.07.18
申请人
SHARP CORP
发明人
SAITO MASAHIKO;MURATANI TOSHIAKI
分类号
H01L21/302;H01L21/3065;H01L21/768
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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