| 摘要 |
PURPOSE:To shorten the design period of layout data by inspecting design rules concerning editing data immediately after editing. CONSTITUTION:Mask layout data 21 are displayed on a screen and stored in a storage means 22. Next, all design rules related to an attribute (for example, a mask level) which the data to be edited have are taken out of a design rule storage means 23 and stored into a storage means 24 again. The maximum value of dimensions specified by the design rules is taken out. Overlapping parts are removed from the data stored in a storage means 25 and as the design rules stored in the storage means 24 are referred to, the design rules are inspected. Here, when a violation of the design rules is discovered, an alarm is given immediately and they are edited again. |
