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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0228382(A)
申请公布日期
1990.01.30
申请号
JP19880179713
申请日期
1988.07.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
YOSHIMURA HIDEFUMI
分类号
H01L21/8247;H01L21/314;H01L29/06;H01L29/788;H01L29/792
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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