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发明名称
CHARGED PARTICLE BEAM SCANNING METHOD
摘要
申请公布号
JPH0227300(A)
申请公布日期
1990.01.30
申请号
JP19880176995
申请日期
1988.07.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
NISHIHARA SUSUMU
分类号
G21K1/093;H01J37/147
主分类号
G21K1/093
代理机构
代理人
主权项
地址
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