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发明名称
INSPECTING DEVICE
摘要
申请公布号
JPH0225764(A)
申请公布日期
1990.01.29
申请号
JP19880176584
申请日期
1988.07.14
申请人
TOKYO ELECTRON LTD
发明人
SUZUKI HIROSHI
分类号
G01R31/00;G01R31/26;H01L21/66
主分类号
G01R31/00
代理机构
代理人
主权项
地址
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