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发明名称
METHOD AND DEVICE FOR INSPECTING DEFECT OF DIE FOR FORMING SUBSTRATE FOR INFORMATION RECORDING MEDIUM
摘要
申请公布号
JPH0225735(A)
申请公布日期
1990.01.29
申请号
JP19880173814
申请日期
1988.07.14
申请人
CANON INC
发明人
KAMIO MASARU
分类号
G01N21/88;G01N21/93;G01N21/95;G11B7/26
主分类号
G01N21/88
代理机构
代理人
主权项
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