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发明名称
MASTER SLICE LSI
摘要
申请公布号
JPH0225054(A)
申请公布日期
1990.01.26
申请号
JP19880175517
申请日期
1988.07.13
申请人
MITSUBISHI ELECTRIC CORP
发明人
SUEMITSU KEIICHI;OKUNO YOSHIHIRO
分类号
H01L21/822;H01L21/82;H01L27/04;H01L27/118
主分类号
H01L21/822
代理机构
代理人
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