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发明名称
INSPECTING APPARATUS OF SPECIMEN
摘要
申请公布号
JPH0224560(A)
申请公布日期
1990.01.26
申请号
JP19880173579
申请日期
1988.07.12
申请人
CANON INC
发明人
ITO YUJI
分类号
G01N33/543;G01N15/14
主分类号
G01N33/543
代理机构
代理人
主权项
地址
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