| 摘要 |
PURPOSE:To increase remarkably the dust absorbing efficiency, by providing an absorbing chamber which is absorbed inside of a part to be processd at the center of a disk and a dust absorbing chamber contacting and enclosing said part to an a sorbing pad at the center part. CONSTITUTION:An adsorbing chamber 5a is provided to an adsorbing pad 5 which is made of a highly flexible material and set at the center part. At the same time, a dust absorbing chamber 5b is provided at the entire outer circumference part of the chamber 5a. The air ventholes 5a1 and 5b1 are provided to the chambers 5a and 5b respectively. In addition, the tip diameter of an inner fin 5c between the chmbers 5a and 5b is set smaller than the diameter of a part to be processed 1c of a disk 1. At the same time, the tip diameter of an outer fin 5d is set larger than the diameter of the part 1c. |
