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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0221640(A)
申请公布日期
1990.01.24
申请号
JP19880141449
申请日期
1988.06.08
申请人
YOKOGAWA HEWLETT PACKARD LTD
发明人
DANIERU DEIIN KETSUSURAA;ROBAATO DABURIYUU UU;KURISUTOFUAA SHII BIITEI;MAAKU DEE KURUKU
分类号
H01L21/302;H01L21/3065;H01L21/311;H01L21/768;H01L23/522
主分类号
H01L21/302
代理机构
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