| 摘要 |
PURPOSE:To enable a test program to be modified promptly and easily without stopping a tester for mass production by executing write-in and read-out of data corresponding to both a tester and a terminal unit. CONSTITUTION:This is composed of a first tester 1 (for trial manufacture) which sets a program to do test, a first floppy disk 4 which memorizes a test program, a second tester 5 (for mass production) in which a first floppy disk 4 is installed and which tests the chip of a mass production semiconductor wafer, a second floppy disk 8 which stores the test results, and terminal units 9 and 10 (personal computer and FDD) in which a second floppy disk 8 is installed and which do data processing based on the test results. And improper program is written in the second floppy disk as it is and is set in the terminal unit and is modified here, and is written again in the floppy disk 8. This floppy disk is returned again to the tester 5 for mass production, and after the test model currently in execution is finished, the modified program is executed. Hereby, the operation rate of the tester for mass production improves. |
